The MKS Loadlock Vacuum Transducer MicroPirani-Piezo combines advanced Piezo and MicroPirani sensor technologies to deliver superior accuracy, stability, repeatability, and fast response time compared to conventional thermal conductivity gauges. Engineered for vacuum loadlock applications, it features a wide pressure measurement range from 0.00001 to 1000 Torr with atmospheric switching and a compact NW16 ISO-KF flange design.
Product Features
- Dual sensing technology: Piezo and MicroPirani sensors improve accuracy, stability, and response time
- Pressure measurement range from atmosphere down to 10^-5 Torr
- Gas-independent absolute pressure measurement from 50 to 1000 Torr
- Atmospheric switching capability enables replacement of multiple pressure devices in loadlock applications
- MicroPirani sensor built from a 1 mm² silicon chip for high-precision low-volume measurement
- Reads pressures two decades below standard Pirani sensors (down to 10^-5 Torr)
- Minimized convection effects allow mounting in any orientation without accuracy loss
- RS485 digital communication interface for parameter setup and real-time pressure monitoring
- Analog pressure output of 1 VDC/decade compatible with external equipment
- Selectable analog outputs and curves via digital interface; optional secondary analog output for differential pressure measurement
- Up to three mechanical relays for process control (e.g., interlocking pumps and isolation valves)
- Each set point can be assigned to differential piezo measurement or combined absolute MicroPirani/Piezo measurement
- Compact design reduces system footprint, saving space in loadlock configurations
Benefits
- Highly accurate, gas-independent pressure measurements improve process reliability and repeatability
- Wide dynamic range from high vacuum to atmosphere supports diverse process needs
- Faster cycle times and reduced risk of loadlock contamination from atmospheric air
- Compact form factor helps save space in equipment design and integration
- Flexible output options and digital communication enhance process control and monitoring
- Integrated relays automate safety interlocks, increasing system efficiency and protection
Why Choose the MKS Loadlock Vacuum Transducer MicroPirani-Piezo?
Designed specifically for vacuum loadlock applications, the MKS Loadlock Vacuum Transducer MicroPirani-Piezo delivers fast, reliable, and gas-independent pressure measurement across a wide range. Its dual sensing technology, compact design, RS485 interface, and integrated relays make it an ideal choice for advanced process systems that demand accuracy, speed, and space efficiency.
