The MKS 974B QuadMag™ Vacuum Transducer combines advanced cold cathode inverted magnetron, MicroPirani™, and Piezo differential vacuum sensor technologies in a compact and versatile unit. Designed for applications requiring precise vacuum measurement with both digital and analog operation, the 974B offers a multi-sensor solution that saves space and reduces overall system costs.
Product Features
- Small footprint design provides a compact vacuum gauge solution that saves valuable tool space
- User serviceable components reduce downtime and simplify maintenance
- Supports both analog and digital communication protocols for flexible integration
- Low-cost multi-sensor design combining three sensor technologies in one unit
- Optional local display for on-site pressure monitoring
Cold Cathode, MicroPirani™, & Piezo Pressure/Vacuum Gauges
The MKS Granville-Phillips modular vacuum gauges and transducers feature a compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.
Measurement range: 1×10-8 to 1500 Torr
Applications
- Pressure measurement within vacuum load locks, replacing multiple pressure measurement devices
- Analytical equipment such as mass spectrometer control
- Scanning electron microscopes
- Coating systems
- Semiconductor loadlock pressure control
- General vacuum base pressure measurement
Benefits
- Multi-technology sensor integration allows accurate, broad-range vacuum measurement
- Compact size saves valuable laboratory or tool space
- Flexibility with analog and digital outputs for diverse system compatibility
- User serviceability lowers maintenance costs and downtime
- Optional local display enhances ease of use and quick pressure verification
Why Choose the MKS 974B Vacuum Transducer?
The MKS 974B QuadMag™ offers a reliable, cost-effective solution for complex vacuum measurement needs by combining three sensor technologies in one compact unit. Its versatility, broad measurement range, and user-friendly features make it an excellent choice for demanding applications in semiconductor manufacturing, analytical instrumentation, and vacuum process control.
