The MKS P9B Mass Flow Controller (MFC) is a pressure-insensitive, multi-gas, multi-range device engineered for precise hydrogen gas flow control up to 5000 SCCM. Built for versatility and speed, it delivers sub-750 millisecond control times and maintains high accuracy across a wide range of process gases, from light gases like helium to heavy gases such as SF6.
Product Features
- Flow rates from 5 to 50,000 sccm Full Scale, supporting diverse application needs
- Pressure-insensitive operation with integral pressure sensor for stable flow control
- Multi-gas and multi-range capability reduces inventory and increases flexibility
- Accuracy within 1% of set point, even across varied gases and ranges
- Fast control response with sub-750 millisecond settling time
- Analog I/O: 0 to 5 VDC for straightforward integration
- Digital I/O options including DeviceNet and EtherCAT for modern process control
- Teflon sealing for chemical resistance and compatibility with reactive gases like hydrogen
Benefits
- Minimizes downtime and process variability with fast, repeatable control
- Supports multiple gases and ranges with a single device, reducing MFC inventory
- Pressure-insensitive design maintains consistent performance under varying process pressures
- Easy integration into digital and analog control systems
- Robust construction with Teflon seals extends device lifespan in demanding environments
Why Choose the MKS P9B MFC H2, 5000 SCCM, RS-485, N.C. Teflon, PFCB953CR15T30?
Combining quick response, multi-gas flexibility, and precise control, the MKS P9B MFC is designed for demanding hydrogen applications up to 5000 SCCM. Its pressure-insensitive design and wide I/O options make it ideal for advanced industrial and lab processes where reliability and adaptability matter most.
