The MKS GM50A Mass Flow Controller is a multi-gas, multi-range, digitally-controlled device designed for precise and reliable nitrogen flow control up to 500 SCCM. Engineered with a metal-sealed body and Teflon valve plug, it delivers exceptional chemical compatibility and durability. Advanced MKS digital control algorithms ensure fast, repeatable response to set points, making it ideal for demanding lab and industrial applications.
Product Features
- Supports flow rates from 5 to 50,000 SCCM; configured here for 500 SCCM nitrogen
- Multi-gas, multi-range capability for flexible use across applications
- Metal-sealed construction with Teflon valve plug for enhanced chemical resistance
- Wide choice of digital I/O: PROFIBUS, EtherCAT, DeviceNet, PROFINET, RS485, and analog options (0-5 VDC or 4-20 mA)
- Advanced digital control electronics for fast and precise flow regulation
- Typical response time around 500 milliseconds
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Settling time under 750 milliseconds for quick stabilization
- Digital calibration achieving 1% of set point accuracy on calibration gas
Benefits
- Accurate and repeatable flow control improves process consistency
- Fast response and settling times enhance process efficiency and throughput
- Metal seal and Teflon valve plug provide durability in aggressive gas environments
- Flexible digital and analog connectivity options for easy integration
- Multi-gas capability supports diverse applications and reduces inventory needs
Why Choose the MKS MFC, N2, 500 SCCM, Profibus 1179, N.C. Teflon, LCMA52CR13M20?
The MKS GM50A offers precise digital flow control for nitrogen at 500 SCCM, backed by robust construction and advanced control electronics. Its wide range of I/O options, rapid response, and reliable performance make it a trusted choice for laboratory, semiconductor, and industrial gas delivery systems where accuracy and flexibility are essential.
