The MKS Mass Flow Controller (MFC) offers precise, digitally controlled nitrogen flow measurement up to 20,000 SCCM. Designed for multi-gas, multi-range applications, this elastomer-sealed device features advanced control electronics for fast, repeatable response. It provides flexible connectivity options and high accuracy to suit demanding industrial and laboratory processes.
Product Features
- Flow rates from 5 to 50,000 sccm for versatile application coverage
- Seal and valve plug options include Viton, Buna, Neoprene, or Kalrez for chemical compatibility
- Wide choice of digital I/O: EtherCAT, DeviceNet, Profibus, PROFINET, and RS485
- Analog I/O: 0–5 VDC or 4–20 mA for integration flexibility
- Standard closed conductance leak rate less than 0.1% of Full Scale
- Typical response times around 500 milliseconds enable fast control
- Less than 750 millisecond settling time ensures stable flow regulation
- Digital calibration delivers accuracy within 1% of set point on the calibration gas
- Elastomer sealing with Viton provides excellent chemical resistance and durability
Benefits
- Fast, accurate nitrogen flow control optimizes process performance
- Multi-gas and multi-range capability reduces the need for multiple devices
- Flexible analog and digital communication options simplify system integration
- Low leak rate design supports safe and reliable operation
- Robust Viton seals enhance durability in harsh environments
Why Choose the MKS MFC N2, 20,000 SCCM, 9 Pin Analog, N.C. Viton, LCEA24CS1AV20?
Combining precision digital control with versatile sealing and connectivity, the MKS MFC is ideal for nitrogen flow applications up to 20,000 SCCM. Its multi-gas flexibility, fast response, and reliable design make it a trusted choice for advanced laboratory and industrial systems.
