The MKS GE50A is a general-purpose, digitally-controlled mass flow controller designed for multi-gas and multi-range applications, supporting flow rates up to 50 slm. It features a standard 3-inch footprint for easy integration without modifying existing gas lines. The controller uses advanced digital electronics with the latest MKS control algorithms, offering fast, repeatable response and 1% calibration accuracy. The device includes elastomer sealing options, with all wetted surfaces constructed from metal for durability and compatibility with various gases.
Product Features
- Digitally-controlled with RS485, Profibus, EtherCAT, or DeviceNet I/O options
- Fast response time of approximately 500 milliseconds
- 1% of setpoint accuracy on calibration gas for precise process control
- Standard 3-inch footprint compatible with existing gas line setups
- Minimal elastomers: single external elastomer seal and valve plug
- All wetted surfaces are metal, ensuring chemical resistance and durability
- Seal options include Viton, Buna, Neoprene, or Kalrez for different gas compatibilities
- Patented thermal sensor design provides exceptional zero stability
- Embedded user interface for easy range and gas changes, performance monitoring
Applications
The GE50A is ideal for a wide variety of flow control applications requiring precise control from 10 sccm to 50 slm full scale (N2 equivalent), suitable for general-purpose industrial and laboratory use.
Benefits
- Ensures accurate and reliable gas flow control with precise calibration
- Easy integration into existing systems with standard footprint and versatile I/O options
- Flexible seal materials support multiple gas types and harsh environments
- User-friendly interface allows quick setup and adjustments without additional tools
Why Choose the MKS MFC, N2, 20 SCCM, 15 Pin Analog, N.C. Viton, LCEA21CS1BV20?
The MKS GE50A mass flow controller combines precision, durability, and ease of use for versatile gas flow control across a broad range of applications. Its advanced technology and robust construction make it a dependable choice for demanding industrial and laboratory environments.
