The MKS GE50A General Purpose Multi-gas, Multi-range Mass Flow Controller (MFC) delivers precise, fast, and stable gas flow control for a wide range of applications up to 50 slm Full Scale (N₂ equivalent). Its patented thermal sensor design, advanced digital calibration, and robust construction make it ideal for modern industrial and laboratory environments where performance and flexibility are essential. With a compact 3-inch footprint, the GE50A is designed for easy drop-in replacement in existing gas line configurations without modification.
Product Features
- General purpose multi-gas, multi-range elastomer-sealed mass flow controller for flow rates up to 50 slm
- Patented thermal sensor design for exceptional zero stability
- Percent of setpoint accuracy ensures precise process control
- Digital control electronics deliver fast response times (~500 milliseconds) and settling time under 750 milliseconds
- Standard closed conductance leak rate below 0.1% of Full Scale
- Seal and valve plug options: Viton, Buna, Neoprene, Kalrez to match gas compatibility requirements
- All wetted surfaces are metal with only one external elastomer seal and elastomer valve plug
- Available I/O protocols: RS485, Profibus™, EtherCAT, DeviceNet™ for versatile integration
- Embedded user interface allows easy device range changes, gas selection, and performance monitoring
- Compact 3-inch footprint fits existing installations without gas line changes
Applications
- General-purpose gas flow control for N₂ equivalent gases
- Processes requiring flow control capability from 10 sccm to 50 slm Full Scale
- Semiconductor, laboratory, and industrial systems
- Systems replacing RS485 and DeviceNet versions of the MKS 1179A MFC
Benefits
- High zero stability ensures reliable, repeatable measurements over time
- Fast response and precise control optimize process performance
- Multi-gas and multi-range support increase flexibility and reduce inventory needs
- Robust metal-wetted surfaces enhance durability and chemical compatibility
- Compact design saves valuable tool and bench space
Why Choose the MKS GE50A?
Designed for demanding applications across semiconductor, industrial, and research sectors, the MKS GE50A MFC combines precision, speed, and versatility in a compact package. Its advanced control algorithms, patented thermal sensor, and flexible I/O options make it ideal for accurate flow control across a wide range of gases and flow rates. Backed by MKS engineering, the GE50A delivers reliable performance and seamless integration into new or existing systems.
