The MKS GE50A digitally-controlled Mass Flow Controller provides precise and reliable nitrogen flow control with advanced digital electronics and versatile communication interfaces. Designed for fast and repeatable response, it supports flow rates up to 10,000 sccm and is suitable for demanding industrial and laboratory applications.
Product Features
- Flow rates range from 5 to 50,000 sccm for broad application flexibility
- Seal and valve plug options include Viton, Buna, Neoprene, or Kalrez to ensure chemical compatibility
- Wide choice of digital I/O: EtherCAT, DeviceNet, Profibus, PROFINET, and RS485
- Analog output options of 0-5 VDC or 4-20 mA for integration with external equipment
- Standard closed conductance leak rate of less than 0.1% of full scale for tight flow control
- Typical settling time under 750 milliseconds for rapid response
- Digital calibration achieving 1% set point accuracy on calibration gas
- Fast response time around 500 milliseconds enabled by MKS control algorithms
Benefits
- Accurate and repeatable nitrogen flow control for process consistency
- Multiple communication and output options facilitate easy system integration
- Low leak rate minimizes contamination risks and maintains process integrity
- Quick response and settling improve process efficiency and control
- Varied seal materials enhance compatibility with different gases and environments
Why Choose the MKS GE50A MFC N2, 10K SCCM, 1/4" Swagelok, DeviceNet, Viton, Closed Valve?
The MKS GE50A Mass Flow Controller combines advanced digital control, robust construction, and versatile connectivity. Its fast response, high accuracy, and minimal leak rate make it an ideal choice for precise nitrogen flow measurement and control in critical applications.
