The MKS GE50A Mass Flow Controller delivers precise, stable control of argon gas at flow rates up to 500 sccm. Engineered for fast response and accuracy, this versatile controller combines advanced digital control electronics with robust analogue I/O (0–5 VDC) for seamless integration into demanding process environments. Built with Viton seals and a normally closed valve configuration, it offers reliable leak-tight performance in applications requiring exceptional control and chemical compatibility.
Product Features
- Flow rates from 5 to 50,000 sccm to cover a wide range of applications
- Viton seal and valve plug options for enhanced chemical compatibility
- Choice of digital I/O (EtherCAT, DeviceNet™, Profibus, PROFINET, RS485) or analogue (0–5 VDC or 4–20 mA)
- Standard closed conductance leak rate of less than 0.1% of Full Scale
- Fast settling time under 750 milliseconds for responsive control
- Digital calibration ensures 1% of set point accuracy on the calibration gas
- Compact design with Swagelok 4 VCR male connections and 15‑pin interface
Benefits
- High accuracy – Digital calibration maintains 1% of set point accuracy, ensuring precise gas delivery in critical processes.
- Rapid response – Typical settling time under 750 ms keeps your process stable and productive.
- Flexible connectivity – Supports both modern fieldbus systems and classic analogue control for seamless system integration.
- Robust sealing – Viton seals provide excellent chemical resistance, extending product life in challenging environments.
- Wide operating range – Suitable for flows from as low as 5 sccm up to 50,000 sccm, ideal for diverse process requirements.
- Leak-tight performance – Closed conductance leak rate below 0.1% of Full Scale protects sensitive processes and ensures reliability.
Why Choose the MKS GE50A?
Combining cutting-edge control electronics, fast response, and rugged construction, the MKS GE50A is built to deliver stable, precise gas flow for demanding industrial and laboratory applications. Its flexibility in connectivity, compact footprint, and high-accuracy performance make it a preferred choice for engineers and researchers seeking reliability and ease of integration.
