The MKS 925 Micro Pirani Vacuum Transducer features a compact MEMS-based thermal conductivity sensor designed for accurate vacuum measurement from 1.0x10⁻⁵ Torr up to atmospheric pressure. This advanced gauge offers analog voltage output, digital communication interfaces, and optional set point relays for precise process control. Its modular design reduces installation costs and allows mounting in any orientation, making it ideal for applications where controller size and local control are critical.
Product Features
- Wide measurement range from 1x10⁻⁵ Torr to atmosphere, extending two decades beyond standard Pirani gauges
- MEMS-based Micro Pirani thermal conductivity sensor for enhanced accuracy
- Analog voltage output and digital communication options
- Mountable in any orientation for flexible installation
- Three optional set point relays for automated process control
- Optional local display for immediate vacuum readout
- Configurable with multiple flange types, connectors (Hirschmann, RJ45), and analog output voltages for plug-and-play OEM replacements
- Compatible with VCR-style parts for reliable vacuum sealing
Benefits
- Extends measurable vacuum range beyond standard Pirani gauges for versatile use
- Provides accurate, reliable vacuum monitoring in compact form
- Flexible mounting and connectivity options simplify integration
- Supports advanced process control with multiple set point relays
- Reduces installation costs with modular, compact design
Applications
- General vacuum pressure measurement
- Foreline and roughing pressure measurement
- Gas backfilling measurement and control
- Mass spectrometer control
- Activation of ultra-high vacuum (UHV) gauges
- System process control including interlocks, valves, and pumps
- Control system pressure monitoring
Why Choose the MKS 925 Micro Pirani?
The MKS 925 Micro Pirani Vacuum Transducer delivers high-accuracy vacuum measurement across a broad range, supported by flexible installation and control options. Its modular design and broad compatibility make it an excellent choice for semiconductor, analytical, industrial coating, freeze drying, and other demanding vacuum applications.
