The MKS 901P Loadlock Transducer combines Piezo and MicroPirani vacuum sensor technologies in a compact modular design optimized for vacuum load lock environments. Offering a wide measurement range from 1.0×10⁻⁵ to 1000 Torr with atmospheric switching, it delivers enhanced accuracy, stability, and faster response times compared to conventional thermal conductivity gauges.
Product Features
- Three sensor functions integrated into a single transducer for extensive measurement range
- Ultra-compact design minimizes installation space and reduces costs
- Setup, diagnostic, and operation software available for easy configuration
- Optional analog output and electrical connectors compatible with other vendors' gauges for straightforward upgrades
- Three optional setpoints for flexible control and monitoring
- Optional local display for on-site measurement visibility
- KF16 flange connection and RS232 communication interface
- Three relay outputs for advanced process control
Applications
The 901P MicroPirani/Piezo Loadlock Vacuum Transducer is specifically designed for precise vacuum and pressure measurement within vacuum load lock chambers. It supports seamless integration into vacuum systems requiring compact, reliable, and versatile pressure sensing.
Benefits
- Wide dynamic range ensures accurate readings across vacuum and low-pressure conditions
- Compact size saves valuable space in tight installation environments
- Fast response improves process control and reduces downtime
- Flexible outputs and connectivity options facilitate system upgrades and compatibility
- Robust sensor technology provides high stability and repeatability for consistent performance
- Advanced relay functionality enables precise threshold monitoring and automation
Why Choose the MKS 901P Loadlock Transducer?
The MKS 901P Loadlock Transducer offers a unique combination of multi-sensor capability, compact design, and flexible interfacing. Tailored for load lock vacuum applications, it provides reliable, high-accuracy pressure measurement with fast response times, making it an ideal choice for advanced vacuum process control.
