The G-Series GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow Rates from 50 to 100 slm
- Metal sealed with elastomer plug
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Less than 750 millisecond settling time
