The P9B pressure-insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of set point over a broad range of process gases, from "light" gases such as helium to "heavy" gases like SF6. P9B is a true multi-range/multi-gas MFC, capable of 5 sccm to 50 slm Full Scale flow rates, minimizing MFC inventory requirements.
- Flow rates from 5 to 50,000 sccm
- Pressure insensitive with integral pressure sensor
- Multi-gas/multi-range with 1% of set point accuracy
- Analog I/O: 0 to 5 VDC
- Digital I/O: DeviceNet, EtherCAT
