The Logitech EP1 Grooved Polishing Pad, 20 in, 10 mm XY (0CON-367) is an expanded polyurethane CMP pad for precision polishing of hard materials. This single 20 in / 508 mm pad has a 0.050 in thickness, pressure-sensitive adhesive backing and a 10 mm XY grooved surface.
Key Features
- 20 in / 508 mm diameter, supplied as the single-pad EP1-G configuration
- 10 mm XY grooved surface, designed to support efficient slurry distribution during polishing
- 0.050 in pad thickness, matching the manufacturer-listed configuration for part 0CON-367
- Pressure-sensitive adhesive backing, providing secure and stable attachment to the polishing plate
- High-hardness EP1 polyurethane, with Shore A hardness of 96 and Shore D hardness of 46
- Controlled foamed elastomer structure, helping improve planarity across demanding polishing processes
- Measured density of 0.70 g/cm³, with 7.5% dynamic compressibility and 93% elastic rebound
- Porous expanded polyurethane surface, selected for controlled abrasive retention and surface-finish performance
- Suitable for hard polishing materials, including silicon, sapphire, ceramics and optical substrates
- Designed for larger sample surfaces, with the grooved configuration recommended for areas greater than 20 cm²
Benefits
- Promotes more even slurry movement across the pad through the 10 mm XY groove pattern.
- Helps maintain polishing planarity through the firm, controlled-cell EP1 structure.
- Provides secure installation and reduces pad movement through the PSA backing.
- Supports consistent recovery under compression for repeatable polishing contact.
- Provides a purpose-selected surface for precision polishing of hard semiconductor, ceramic and optical materials.
Why Choose the Logitech EP1 Grooved Polishing Pad, 20 in, 10 mm XY (0CON-367)?
Choose the Logitech EP1 Grooved Polishing Pad, 20 in, 10 mm XY (0CON-367) when a firm, PSA-backed CMP pad is required for larger polishing surfaces and hard materials. Its grooved EP1 construction combines controlled compressibility, high hardness and efficient slurry distribution. John Morris Group supplies this Logitech polishing consumable for laboratory and materials-processing applications across Australia.
