The Logitech CMP Orbis with 4 Pump Modules and Vacuum Carriers (1CM64-S-3112) is a floor-standing chemical mechanical polishing system for R&D and pilot production testing. It accommodates two samples up to 200 mm or multiple smaller samples using templates, while providing analytical monitoring and configurable process control.
Key Features
- Product-specific four-pump configuration, supplied with four pump modules and vacuum carriers
- Designed for research and pilot production, providing a laboratory platform for preproduction CMP testing
- High-capacity sample workspace, accommodating two samples up to 200 mm or multiple smaller samples with templates
- Production-scale processing capability, delivered within a laboratory-scale footprint
- Motor-driven carrier heads, supporting controlled polishing processes
- Plate speeds up to 160 rpm, enabling adjustable polishing rates and process control
- Configurable operating parameters, allowing the operator to tailor machine settings and process conditions
- Software-based analytical functions, supporting process data collection and evaluation
- Real-time process monitoring, using onboard analytical sensors and the system interface
- USB data export, allowing collected process information to be saved for external analysis
- Multi-stage recipe management, enabling users to build, save and recall repeatable processes
- In-process pad conditioning, using an industry-standard diamond pad conditioner mounted on the second motor-driven carrier
- Resistance to standard CMP chemicals, including sodium hypochlorite
- Broad fabrication suitability, covering back-end IC manufacturing, MEMS, Opto-MEMS and Bio-MEMS processes
Benefits
- Supports controlled development and refinement of CMP processes before production-scale implementation.
- Increases sample throughput by accommodating two large samples or multiple smaller samples within one workspace.
- Improves process repeatability through saved multi-stage recipes and configurable operating conditions.
- Provides immediate visibility of processing conditions through onboard monitoring and analytical functions.
- Simplifies further analysis by allowing process data to be saved and exported through the USB port.
- Helps maintain consistent pad performance through integrated in-process diamond conditioning.
Why Choose the Logitech CMP Orbis with 4 Pump Modules and Vacuum Carriers (1CM64-S-3112)?
The Logitech CMP Orbis with 4 Pump Modules and Vacuum Carriers (1CM64-S-3112) combines flexible process control, analytical monitoring and sample capacity up to 200 mm in a floor-standing research system. John Morris Group can assist with product selection, configuration and supporting equipment for chemical mechanical polishing applications.
