The Baratron® 622D unheated absolute capacitance manometer is the latest of MKS' analog, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10 VDC analog output signal that is linear with pressure.
- 0 to 10 VDC proportional analog output with terminal block
- Direct measurement of chamber total pressure independent of gas type
- Long-term output stability for state-of-the-art process repeatability
- Inconel® and Incoloy® nickel alloy construction of basic sensor
- High overpressure limit ensures reliability during system mishaps
- Specified in percent of reading for best accuracy and improved process yield
