The MKS Pirani Vacuum Sensor, Convection-Enhanced, is designed for reliable foreline pressure measurement in a wide range of industrial applications. With a measurement range from 1.0 x 10⁻³ to 1000 Torr, it is ideal for processes such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze drying. Bakeable and radiation-resistant versions are available to meet the demands of high-energy physics environments.
Product Features
- General purpose convection-enhanced Pirani vacuum sensor for foreline pressure measurement up to 1000 Torr
- Measurement range from 1.0 x 10⁻³ to 1000 Torr covering a broad vacuum spectrum
- Bakeable versions capable of withstanding high-temperature bakeouts up to 250°C
- Radiation-resistant models available for use in high-energy physics and harsh environments
- Low-cost, rugged design optimized for durability and long-term stability
- Standard 2.75 inch CF flange for easy integration into vacuum systems
Benefits
- Versatile sensor suitable for a wide variety of industrial vacuum applications
- High temperature bakeability enables sensor longevity in demanding processes
- Radiation resistance extends sensor life and reliability in harsh environments
- Cost-effective solution with robust construction reduces maintenance and replacement costs
- Compact form factor simplifies installation and system integration
Why Choose the MKS Pirani Vacuum Sensor?
The MKS Pirani Vacuum Sensor with convection-enhanced technology offers accurate, stable foreline pressure measurement essential for process control in many industries. Its durable, bakeable, and radiation-resistant design ensures dependable performance even in challenging conditions, making it the preferred choice for applications ranging from semiconductor manufacturing to high-energy physics.
