The MKS MICROPIRANI™ / PIEZO Loadlock Transducer, KF16, is engineered specifically for load lock environments, combining Piezo and MicroPirani™ vacuum sensor technologies into one compact unit. This advanced transducer delivers superior accuracy, stability, repeatability, and fast response times compared to conventional thermal conductivity gauges, ensuring optimal process control.
Product Features
- Absolute pressure measurement range from 1,000 to 10⁻⁵ Torr covering ultra-high to medium vacuum
- Three sensor functionalities integrated into a single transducer for wide measurement range
- Available with analog, RS232, RS485, and EtherCAT communication interfaces
- Optional integrated touch-screen display for local pressure indication and ease of use
- Fast, accurate, and repeatable pressure measurements reduce process cycle times
- Three optional set points with rapid response for reliable and automated process control
Benefits
- Enhanced accuracy and stability improve vacuum measurement confidence in load lock applications
- Wide measurement range enables use across diverse vacuum processes without the need for multiple sensors
- Multiple communication options facilitate integration with existing control systems
- Optional local display simplifies monitoring and reduces dependence on remote systems
- Rapid response and set point control optimize process efficiency and reliability
Why Choose the MKS MICROPIRANI™ / PIEZO Loadlock Transducer?
Designed for demanding vacuum environments, the MKS MICROPIRANI™ / PIEZO Loadlock Transducer offers unmatched precision and versatility. Its combination of sensor technologies and flexible communication options make it the ideal choice for efficient and accurate load lock vacuum measurement and control, helping to streamline processes and reduce cycle times.
