The MKS GM50A Metal Sealed Digital Mass Flow Controller (MFC) is engineered for precise and reliable control of silane (SiH4) gas flow in critical applications. Featuring metal-sealed construction and 4 VCR male fittings, this MFC ensures superior leak-tight performance and chemical resistance. The device comes equipped with a 15-pin connector and a normally closed valve configuration, providing robust digital control and easy integration into complex gas delivery systems.
Product Features
- Metal-sealed design for enhanced leak tightness and durability
- Specifically calibrated for silane (SiH4) gas
- Equipped with 4 VCR male fittings for secure and reliable connections
- Digital control electronics for fast, accurate flow regulation
- 15-pin connector enables straightforward integration with control systems
- Normally closed valve configuration for safety and process control
Benefits
- Ensures precise and stable gas flow control for sensitive semiconductor processes
- Reduces risk of leaks and contamination with metal sealing technology
- Enhances system safety with normally closed valve design
- Simplifies installation and maintenance with standard connectors and fittings
Why Choose the MKS GM50A Metal Sealed Digital Mass Flow Controller?
Designed for demanding environments requiring high purity and reliability, the MKS GM50A provides advanced digital flow control for silane gas with robust metal sealing and proven valve technology. It offers superior accuracy, durability, and safety to optimize process performance in semiconductor and other high-tech industries.
