The MKS GE50A Mass Flow Controller (MFC) is a digitally controlled device designed to deliver fast, accurate, and repeatable gas flow control in demanding process applications. Supporting a wide range of digital and analog I/O options, the GE50A combines high precision with robust construction to handle flow rates up to 1,000 sccm of CO gas. Advanced MKS control algorithms ensure rapid response to set point changes, making it ideal for semiconductor, analytical, and industrial applications requiring stable and reliable gas delivery.
Product Features
- Flow rate capacity of 1,000 sccm CO (options up to 50,000 sccm available)
- Advanced digital calibration with 1% of set point accuracy on calibration gas
- Fast response times — typically around 500 milliseconds, with less than 750 millisecond settling time
- Standard closed conductance leak rate under 0.1% of Full Scale
- Wide choice of I/O interfaces: RS485, Profibus™, EtherCAT, PROFINET, DeviceNet™ or analog (0–5 VDC, 4–20 mA)
- Multiple seal and valve plug material options: Viton, Buna, Neoprene, or Kalrez for process compatibility
- ¼” Swagelok fitting and 15 Pin connection with normally closed valve configuration
Benefits
- High accuracy and repeatability ensure consistent process results and reduced waste
- Fast response and settling times improve throughput and process control
- Digital calibration minimizes drift and enhances long-term stability
- Flexible I/O options simplify integration into existing or new systems
- Robust sealing choices increase chemical compatibility and extend product life
Why Choose the MKS GE50A GE50A MFC CO 1000 sccm?
Engineered with cutting-edge control algorithms and digital technology, the MKS GE50A MFC provides precise gas flow control for critical applications. Its compact design, fast response, and flexible connectivity make it ideal for industries requiring reliable, high-performance gas delivery. Whether used in semiconductor manufacturing, analytical instruments, or industrial gas systems, the GE50A ensures accuracy, speed, and long-term stability with minimal maintenance.
