The MKS GE50A Mass Flow Controller (MFC) with Argon gas, 500 sccm flow rate, Swagelok ¼” fittings, analogue 15-pin connector, and digital Ethernet I/O is designed for precise and reliable gas flow control in demanding industrial and laboratory applications. Featuring advanced digital control electronics and multiple I/O options, it delivers fast, accurate, and repeatable flow regulation with exceptional durability thanks to Viton seals and a normally closed valve design.
Product Features
- Flow rate range from 5 to 50,000 sccm for versatile applications
- Seal and valve plug options including Viton, Buna, Neoprene, or Kalrez for chemical compatibility
- Wide selection of digital I/O options: EtherCAT, DeviceNet™, Profibus, PROFINET, and RS485
- Analog I/O options available: 0-5 VDC or 4-20 mA
- Standard closed conductance leak rate less than 0.1% of Full Scale ensuring minimal leakage
- Fast response time with less than 750 milliseconds settling time
- Digital calibration achieves 1% of setpoint accuracy on calibration gas
- Normally closed valve design for safe and reliable shutoff
- Swagelok ¼” fittings for secure and leak-tight connections
Benefits
- Precision control – Achieves accurate gas flow regulation with fast and repeatable response for consistent process performance.
- Flexible integration – Multiple digital and analog I/O options allow seamless connection to various control systems and networks.
- Durable sealing – Viton seals and valve options provide chemical resistance and long operational life even in demanding environments.
- Low leakage – Exceptional leak tightness minimizes gas loss and enhances safety in sensitive applications.
- Reliable operation – Normally closed valve ensures safe shutoff and prevents unwanted gas flow during power loss or system shutdown.
- Wide flow range – Suitable for a broad spectrum of applications from low to high flow rates.
Why Choose the MKS GE50A MFC Ar 500sccm?
The MKS GE50A MFC combines cutting-edge digital control technology with versatile I/O options and robust mechanical design to provide precise, reliable, and safe gas flow management. Its fast response, low leak rate, and durable seals make it ideal for semiconductor manufacturing, analytical instrumentation, and industrial process control. Trust the MKS GE50A for unmatched performance and integration flexibility in critical gas flow applications.
