The MKS GE50A Mass Flow Controller offers precise, digitally controlled gas flow for demanding applications. Designed for nitrogen (N2) at 500 SCCM, it features RS-485 digital communication and Viton seals with normally closed configuration. The advanced digital control electronics leverage the latest MKS algorithms, delivering fast and repeatable set point response times of around 500 milliseconds and ensuring 1% of set point accuracy on calibration gas.
Product Features
- Flow rates available from 5 to 50,000 SCCM for broad application coverage
- RS-485 digital interface for reliable communication and easy system integration
- Seal and valve plug options include Viton, Buna, Neoprene, and Kalrez
- Wide choice of I/O options: digital (EtherCAT, DeviceNet, Profibus, PROFINET, RS485) and analog (0-5 VDC or 4-20 mA)
- Standard closed conductance leak rate of less than 0.1% of full scale
- Fast response: typical settling time under 750 milliseconds
- Digital calibration ensures 1% of set point accuracy on calibration gas
Benefits
- Consistent and precise gas flow control with fast dynamic response
- Flexible connectivity for integration into both modern digital and legacy analog systems
- Reliable operation across different applications thanks to multiple sealing material options
- Minimized downtime with quick response and robust design
- Enhanced process control accuracy with advanced digital calibration
Why Choose the MKS GE50A Mass Flow Controller, N2, 500 SCCM, RS-485, N.C. Viton, LCEA52CA15V20?
Built for precise control and quick response, the MKS GE50A Mass Flow Controller delivers reliable, repeatable flow for critical gas applications. With multiple communication protocols, seal options, and wide flow rate range, it offers flexibility and accuracy trusted by industries worldwide.
