The MKS GE50A Mass Flow Controller is a digitally-controlled, general-purpose multi-gas MFC engineered for fast, precise, and repeatable flow control in demanding process environments. Featuring advanced digital control electronics and patented thermal sensor design, it delivers 1% of setpoint accuracy and exceptional zero stability. The standard 3-inch footprint ensures compatibility with existing gas lines, while its all-metal wetted surfaces and minimal elastomer use enhance durability and chemical resistance.
Product Features
- Patented thermal sensor design for superior zero stability
- Digital calibration for 1% of setpoint accuracy on calibration gas
- Fast response time around 500 milliseconds
- Embedded user interface for easy device range and gas changes, plus performance monitoring
- Available I/O options: RS485, Profibus, EtherCAT, or DeviceNet
- Standard 3-inch footprint compatible with existing MKS 1179A installations
- All-metal wetted surfaces with minimal elastomer sealing
- Choice of Viton, Buna, Neoprene, or Kalrez seals to match different gas applications
Benefits
- High precision – Percent of setpoint accuracy ensures reliable and consistent process control
- Excellent zero stability reduces drift and improves measurement reliability over time
- Quick response time optimizes system performance and reduces process cycle times
- Easy integration – Drop-in replacement for MKS 1179A with minimal coding required
- Enhanced durability – All-metal design and limited elastomer use increase chemical resistance and service life
- User-friendly – Embedded interface simplifies setup, adjustments, and real-time monitoring
Applications
The MKS GE50A is ideal for a wide range of gas flow control applications, supporting flow rates from 10 sccm to 50 slm (N2 equivalent). Suitable for semiconductor manufacturing, industrial gas systems, analytical instrumentation, and laboratory research environments.
Why Choose the MKS GE50A Mass Flow Controller?
Combining cutting-edge thermal sensor technology, digital calibration, and robust design, the MKS GE50A delivers precision, reliability, and flexibility. Its fast response, superior zero stability, and compatibility with various industrial protocols make it an excellent choice for industries requiring accurate, low-maintenance flow control across multiple gases and flow ranges.
