The MKS elite RF Plasma Generator delivers 300 Watts of power at 13.56 MHz, housed in a compact air-cooled half rack design. Equipped with 25-pin analog and RS232 interfaces, this generator is engineered for high performance in plasma applications. It features advanced state-of-the-art technology, including high-speed closed loop control, a class E RF deck, and a switching modulator, all built onto a single printed circuit board assembly. This design virtually eliminates internal wires and connectors, ensuring the highest level of reliability. Suitable for continuous operation or batch tools, the elite RF Plasma Generator is an ideal choice for applications in Solar, LED, MEMS, and semiconductor manufacturing.
Product Features
- 300 Watts output power at 13.56 MHz frequency
- Air-cooled half rack housing for compact installation
- 25-pin analog and RS232 interfaces for flexible system integration
- High-speed closed loop control for precise and stable output
- Class E RF deck and switching modulator for superior performance
- Single printed circuit board design reduces wiring and increases reliability
- Supports both continuous operation and stand-alone batch tools
Benefits
- Consistent and reliable plasma generation across demanding applications
- Compact footprint saves valuable equipment space
- Reduced internal complexity minimizes points of failure and maintenance needs
- Flexible connectivity simplifies integration into existing systems
- Optimized design delivers efficient power with high stability
Why Choose the MKS elite RF Plasma Generator?
Engineered for industries like Solar, LED, MEMS, and semiconductor manufacturing, the MKS elite RF Plasma Generator combines compact design, advanced closed loop control, and robust construction. Its reliable performance and streamlined single-board design make it an excellent choice for precise and stable plasma processing.
