The 631F 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer, operating at very high internal temperatures, minimizes the deposition of process byproducts within the sensor by nearly eliminating output drift caused by contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).
- 150°C or 200°C operating temperatures reduce contamination
- 0 to 10 VDC analog output proportional to absolute pressure
- Two optional pressure trip relays for controlling external equipment
- Inconel® sensor resists corrosion
- Performance is unaffected by pressure bursts
- Compact design & self-contained electronics save space
